Improved Sensitivity MEMS Cantilever Sensor for Terahertz MDPI
Feb 19,2016In this research,vibrating MEMS cantilevers wereMethyl cyanide spectra data collected,using an improved 7 ˆ 2 ˆ 0.01 mm3 cantilever sensortitanium/Gold (Ti/Au) was evaporated onto the tip of the cantilever to serveWest,G.A.; Barrett,J.J.; Siebert,D.R.; Reddy,K.V.Photoacoustic spectroscopy.
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